Ocean-optics PlasCalc Manuel d'utilisateur

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 1 User's Manual Plasma Monitoring &a

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 7 7 Software 7.1 Installation Connect the s

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 8 7.3 Application Windows The application win

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 9 Menu and Tool Bars This is the main window

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 10 7.4 Menu Commands 7.4.1 File Menu New .

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 11 7.4.2 Edit Menu XY-Autoscale Set t

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 12 Delete line/integral Delete selected

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 13 7.4.3 Recording Menu New record C

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 14 Reference spectrum | Subtract reference spe

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 15 Dark spectrum | Open dark spectrum from fil

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 16 Auto pause monitor Pause monitoring automat

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 2 © Copyright

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 17 7.4.6 Tools Menu Spectrometer | Select spe

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 18 7.4.7 View Menu View | Zoom Sw

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 19 7.4.8 Window Menu All windows are listed

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 20 7.5 Tool Bars In the tool bars the most

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 21 7.5.4 Tools Tool Bar Button Action Open cu

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 22 7.5.6 Monitoring Tool Bar Button Action Cr

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 23 7.6 Dialogs 7.6.1 Start Options Start Opti

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 24 7.6.2 Record Options Dialog for setting an

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 25 Trigger Mode Use external trigger Externa

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 26 Data Storage Save spectra Save spectra to

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 3 Contents1 Safety Instructions ...

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 27 Reference Background Save reference spect

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 28 7.6.3 Monitor Options Dialog for setting an

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 29 Tracks (single track) Monitor tracks Sele

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 30 Tracks (combined track) Monitor tracks Se

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 31 Setpoints Upper set-point at Upper set-po

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 32 Data storage Save data Save monitor data

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 33 Options Allow real-time autoscaling for y

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 34 7.6.4 Control Options Actuator (analog outp

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 35 Actuator (digital output) Activate contro

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 36 Control Output channels Selection list o

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 1 1 Safety Instructions Instructions: All

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 37 Options Activate controlling Switch on/o

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 38 PID Control Options Proportional term Kp

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 39 7.6.5 Plot Options Dialog for setting and c

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 40 Tracks Display track Display track in dia

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 41 Diagram Background Background color Axis

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 42 Labels Title Title of diagram x-Axis La

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 43 Fonts Font General font Individual fonts

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 44 Options Display of spectra Display open

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 45 7.6.6 User Setting Dialog for the configura

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 46 7.6.7 Spectrometer Configuration Dialog for

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 2 3 Introduction Ocean Optics PlasCalc Proce

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 47 7.6.8 Configure SpecLine Tool Dialog for co

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 48 8 Specifications Technical Data PlasCalc

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 49 9 End User License Agreement for Software

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 50 5. Limitation of Liability To the extent no

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 51 10 Appendix A 10.1 Endpoint detection with

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 52 From the recorded data select at least two

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 53 If a correlation of the monitor signals and

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 54 If it is not possible to run the process ea

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 55 D. Defining set-points Once you have set-u

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 56 The set-points are displayed in monitor win

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 3 4 Installation 4.1 Installation Do not con

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 4 5 Description With its high resolution min

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 5 6 Functions of Panel controls 6.1 Front P

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 6 6.2 Back Panel The digital inpu